News Release

Air Products and Penn State University Researching Effects of Gas Source Purity on Group III-Nitride-Based Thin Films and Device Structures

October 7, 2002 at 9:49 AM EDT
LEHIGH VALLEY, Pa., Oct 7, 2002 /PRNewswire-FirstCall via COMTEX/ --

Important Implications for Compound Semiconductor Applications

Air Products (NYSE: APD) and The Pennsylvania State University ("Penn State") have announced that they will continue cooperative research efforts to understand the effects of gas source purity on Group III-Nitride (AlGaInN)-based thin films and device structures.

This program -- underway since the beginning of 2002 and part of a larger multi-year, multi-million dollar strategic alliance between the University and Air Products -- has been evaluating typical residual and other metallic impurity levels in layers grown by MOVPE (metalorganic vapor phase epitaxy) using high purity ammonia sources, and the impact of these impurities on the structural, electrical and optical properties of the compound semiconductor materials.

The objective of the program is to conclusively identify and reduce sources of oxygen and other undesired impurities within the MOVPE environment, including the development of new high-purity ammonia sources.

Group III-nitrides have rapidly developed into an important materials system for a wide variety of device applications, ranging from lasers and high brightness LEDs, to high power microwave transistors. MOVPE is the primary technique currently in use for the commercial fabrication of AlGaInN. "Despite the widespread use of MOVPE for AlGaInN growth, there is little available information on the typical concentration and origin of residual impurities in GaN, AlGaN and InGaN layers produced by this method," said Dr. Joan Redwing, Assistant Professor in the Department of Material Sciences and Engineering at Penn State, who is leading the cooperative research efforts. "These impurities can have a significant negative impact on the performance of these compound semiconductor materials."

Michael Hilton, Air Products' vice president, Electronic Gases, Equipment and Services, noted that the research is another example of Air Products' commitment to serving the rising purity and volume requirements of the compound semiconductor industry, which is expected to grow at a rate of 20 to 30 percent per year. Air Products also recently announced a new, ultra-high purity ammonia distillation plant at its Hometown, Pa. electronic specialty gases manufacturing complex, and the development of a new GASGUARD(R) Bulk Specialty Gas Supply (BSGS) heated 20,000-pound ISO container for delivering bulk quantities of ultra-high purity ammonia to customers throughout the world.

The Air Products program with Penn State is an outgrowth of relationships built by Solkatronic Chemicals' -- now a business unit of Air Products' Electronics Division -- ongoing efforts to develop improved grades of ammonia for use in ultra-sensitive GaN processes for the global compound semiconductor industry. Since the 1998 acquisition and integration of Solkatronic Chemicals, Air Products has established its position as a key electronic gases supplier to the compound semiconductor industry. The company also supplies MEGASYS(R) Total Gas and Chemicals Management services, electronic chemicals and specialty gas delivery systems, as well as individualized support to compound customers in facility design, start-up, systems operation and maintenance, cylinder change outs and emergency response strategies.

Air Products (NYSE: APD) serves customers in technology, energy, healthcare and industrial markets worldwide with a unique portfolio of products, services and solutions, providing atmospheric gases, process and specialty gases, performance materials and chemical intermediates. The company is the largest global supplier of electronic materials, hydrogen, helium and select performance chemicals. Founded in 1940, Air Products is recognized for its innovative culture, operational excellence and commitment to safety and the environment. With annual revenues of $5.7 billion and operations in 30 countries, the company's 18,000 employees build lasting relationships with their customers and communities based on understanding, integrity and passion. For more information, visit www.airproducts.com.

***NOTE: This release may contain forward-looking statements. Actual results could vary materially, due to changes in current expectations.

                    MAKE YOUR OPINION COUNT -  Click Here
               http://tbutton.prnewswire.com/prn/11690X79546338
SOURCE Air Products and Chemicals, Inc.

CONTACT:          Media Inquiries: Catherine E. McDonald, +1-610-481-3673 or
                  mcdonace@apci.com; or Gas Purity Research Inquiries: Dr. Joan Redwing,
                  +1-814-865-8665 or jmr31@psu.edu, or Strategic Alliance Inquiries: Tanna Pugh,
                  +1-814-865-2878 or tannapugh@psu.edu, both of The Pennsylvania State
                  University; or Investor Inquiries: Alexander W. Masetti of Air Products,
                  +1-610-481-7461 or masettaw@apci.com

URL:              http://www.airproducts.com 
http://www.prnewswire.com
Copyright (C) 2002 PR Newswire.  All rights reserved.