Today at SEMICON® West, Schumacher—a unit of Air Products and Chemicals, Inc.'s (NYSE:APD) Electronics Division—unveiled its new ChemGuard® 500 Chemical Refill System with solvent purge*. The stainless steel system is designed for low volatility chemicals such as Tetrakis (dimethylamino) Titanium (TDMAT); Tetrakis (diethylamino) Titanium (TDEAT); Tantalum Pentaethoxide (TAETO); CupraSelect®, Schumacher's patented chemical vapor deposition (CVD) copper source*; as well as other chemicals used in CVD processes.

The ChemGuard 500 System's patented solvent purge process removes residual chemical from container connections, internal plumbing and fab house lines in several quick purge cycles. Schumacher's solvent purge process has proven to yield a cleaning efficiency that is two orders of magnitude better than conventional methods, including combinations of vacuum and blow-down cycles.

"The ChemGuard 500 System's solvent purge process facilitates a rapid container change and also enables chemical clean out of all cabinet piping components as well as fab house lines. This permits servicing of the delivery systems and their components without the risk of contamination," said Thomas A. Steidl, equipment product manager for Schumacher.

The ChemGuard 500 System also uses a direct digital control interface to communicate with process tools supplied by most major tool manufacturers.

Schumacher became part of Air Products' Electronics Division in the late 1980s and a member of the Air Products Electronic Chemicals family in mid-1998. The business unit is a leading worldwide supplier of ultra-high purity chemicals and delivery equipment systems to the semiconductor industry. Schumacher provides process chemicals for CVD dielectrics and metals, oxide passivation, diffusion and ion implant applications, and supplies a full line of temperature controllers, vapor delivery systems and bulk refills systems. Headquartered in Carlsbad, Calif., Schumacher is a global unit with manufacturing and customer support centers in the U.S., Europe and the Pacific Rim.

Air Products and Chemicals, Inc. (www.airproducts.com) is the world's only combined gases and chemicals company. Founded more than 60 years ago, the business has annual revenues of $5.5 billion and operations in 30 countries. Air Products is a market leader in the global electronics and chemical processing industries, and a longstanding innovator in many industrial markets, including coatings, adhesives and polyurethanes. The company distinguishes itself through its 17,500 employees around the world, who build lasting relationships with their customers and communities based on understanding, integrity and passion.

NOTE: This release may contain forward-looking statements. Actual results could vary materially, due to changes in current expectations.

EDITOR'S NOTE: A SEMICON West virtual press kit, including a photo of the new ChemGuard 500 Chemical Refill System with solvent purge, is available at Air Products' on-line Press Room at www.airproducts.com/pressroom. From the Press Room homepage, click on the SEMICON West virtual press kit icon.

*U.S. Registered Trademarks of Air Products and Chemicals, Inc.